Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm

In order to enhance the sensitivity of a Fabry–Perot (F-P) acoustic sensor without the need of fabricating complicated structures of the acoustic-sensitive diaphragm, a mini-type external sound pressure amplification structure (SPAS) with double 10 μm thickness E-shaped diaphragms of different sizes...

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Main Authors: Cheng Li, Xi Xiao, Yang Liu, Xuefeng Song
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/9/2284
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author Cheng Li
Xi Xiao
Yang Liu
Xuefeng Song
author_facet Cheng Li
Xi Xiao
Yang Liu
Xuefeng Song
author_sort Cheng Li
collection DOAJ
description In order to enhance the sensitivity of a Fabry–Perot (F-P) acoustic sensor without the need of fabricating complicated structures of the acoustic-sensitive diaphragm, a mini-type external sound pressure amplification structure (SPAS) with double 10 μm thickness E-shaped diaphragms of different sizes interconnected with a 5 mm length tapered circular rod was developed based on the acoustic sensitive mechanism of the ossicular chain in the human middle ear. The influence of thickness and Young’s modulus of the two diaphragms with the diameters of 15 mm and 3 mm, respectively, on the amplification ratio and frequency response were investigated via COMSOL acoustic field simulation, thereby confirming the dominated effect. Then, three kinds of dual-diaphragm schemes relating to steel and thermoplastic polyurethanes (TPU) materials were introduced to fabricate the corresponding SPASs. The acoustic test showed that the first scheme achieved a high resonant response frequency with lower acoustic amplification due to strong equivalent stiffness; in contrast, the second scheme offered a high acoustic amplification but reduced frequency range. As a result of sensitivity enhancement, adapted with the steel/TPU diaphragm structure, an optical fiber Fabry–Perot sensor using a multilayer graphene diaphragm with a diameter of 125 μm demonstrated a remarkable sensitivity of 565.3 mV/Pa @1.2 kHz due to the amplification ratio of up to ~29.9 in the range of 0.2–2.3 kHz, which can be further improved by miniaturizing structure dimension, along with the use of microstructure packaging technology.
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spelling doaj.art-b0c51c396c3e4599acdc479b0ed03aba2023-11-22T14:30:09ZengMDPI AGNanomaterials2079-49912021-09-01119228410.3390/nano11092284Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene DiaphragmCheng Li0Xi Xiao1Yang Liu2Xuefeng Song3School of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, ChinaSchool of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, ChinaSchool of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, ChinaShenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, ChinaIn order to enhance the sensitivity of a Fabry–Perot (F-P) acoustic sensor without the need of fabricating complicated structures of the acoustic-sensitive diaphragm, a mini-type external sound pressure amplification structure (SPAS) with double 10 μm thickness E-shaped diaphragms of different sizes interconnected with a 5 mm length tapered circular rod was developed based on the acoustic sensitive mechanism of the ossicular chain in the human middle ear. The influence of thickness and Young’s modulus of the two diaphragms with the diameters of 15 mm and 3 mm, respectively, on the amplification ratio and frequency response were investigated via COMSOL acoustic field simulation, thereby confirming the dominated effect. Then, three kinds of dual-diaphragm schemes relating to steel and thermoplastic polyurethanes (TPU) materials were introduced to fabricate the corresponding SPASs. The acoustic test showed that the first scheme achieved a high resonant response frequency with lower acoustic amplification due to strong equivalent stiffness; in contrast, the second scheme offered a high acoustic amplification but reduced frequency range. As a result of sensitivity enhancement, adapted with the steel/TPU diaphragm structure, an optical fiber Fabry–Perot sensor using a multilayer graphene diaphragm with a diameter of 125 μm demonstrated a remarkable sensitivity of 565.3 mV/Pa @1.2 kHz due to the amplification ratio of up to ~29.9 in the range of 0.2–2.3 kHz, which can be further improved by miniaturizing structure dimension, along with the use of microstructure packaging technology.https://www.mdpi.com/2079-4991/11/9/2284sound pressure amplification structuredouble diaphragm schemeFabry–Perot sensorgraphene diaphragmsensitivity enhancement
spellingShingle Cheng Li
Xi Xiao
Yang Liu
Xuefeng Song
Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
Nanomaterials
sound pressure amplification structure
double diaphragm scheme
Fabry–Perot sensor
graphene diaphragm
sensitivity enhancement
title Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
title_full Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
title_fullStr Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
title_full_unstemmed Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
title_short Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
title_sort evaluating a human ear inspired sound pressure amplification structure with fabry perot acoustic sensor using graphene diaphragm
topic sound pressure amplification structure
double diaphragm scheme
Fabry–Perot sensor
graphene diaphragm
sensitivity enhancement
url https://www.mdpi.com/2079-4991/11/9/2284
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AT xixiao evaluatingahumanearinspiredsoundpressureamplificationstructurewithfabryperotacousticsensorusinggraphenediaphragm
AT yangliu evaluatingahumanearinspiredsoundpressureamplificationstructurewithfabryperotacousticsensorusinggraphenediaphragm
AT xuefengsong evaluatingahumanearinspiredsoundpressureamplificationstructurewithfabryperotacousticsensorusinggraphenediaphragm