Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, ch...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2017-06-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-017-03678-w |
| _version_ | 1818345070118567936 |
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| author | E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal |
| author_facet | E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal |
| author_sort | E. Baudet |
| collection | DOAJ |
| description | Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters. |
| first_indexed | 2024-12-13T16:56:31Z |
| format | Article |
| id | doaj.art-b0c750d6e4c24261b88d358544db96e4 |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-12-13T16:56:31Z |
| publishDate | 2017-06-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-b0c750d6e4c24261b88d358544db96e42022-12-21T23:37:54ZengNature PortfolioScientific Reports2045-23222017-06-017111410.1038/s41598-017-03678-wExperimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensorsE. Baudet0M. Sergent1P. Němec2C. Cardinaud3E. Rinnert4K. Michel5L. Jouany6B. Bureau7V. Nazabal8Institut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Université de Rennes 1Aix Marseille Université, LISA EA4672, Campus scientifique de Saint JérômeDepartment of Graphic Arts and Photophysics, Faculty of Chemical Technology, University of PardubiceInstitut des matériaux Jean Rouxel (IMN) UMR 6502, Université de Nantes, CNRSIFREMER, Laboratoire Détection, Capteurs et Mesures, Dpt. Recherches et Développements TechnologiquesBRGM, Direction Eau, Environnement et Ecotechnologies, Unité Bio-Géochimie environnementale et qualité de l’EauInstitut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Université de Rennes 1Institut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Université de Rennes 1Institut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Université de Rennes 1Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.https://doi.org/10.1038/s41598-017-03678-w |
| spellingShingle | E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors Scientific Reports |
| title | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors |
| title_full | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors |
| title_fullStr | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors |
| title_full_unstemmed | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors |
| title_short | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors |
| title_sort | experimental design approach for deposition optimization of rf sputtered chalcogenide thin films devoted to environmental optical sensors |
| url | https://doi.org/10.1038/s41598-017-03678-w |
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