Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics
A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10<sup>6</...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/7/1155 |
| _version_ | 1797416955849736192 |
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| author | Desheng Zeng Qiang Liu Chenyang Mei Hongwei Li Qingzhong Huang Xinliang Zhang |
| author_facet | Desheng Zeng Qiang Liu Chenyang Mei Hongwei Li Qingzhong Huang Xinliang Zhang |
| author_sort | Desheng Zeng |
| collection | DOAJ |
| description | A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10<sup>6</sup>, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 10<sup>6</sup>, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of −17.0 dB is achieved at a pump power of 6.50 dBm. |
| first_indexed | 2024-03-09T06:11:51Z |
| format | Article |
| id | doaj.art-b0d1d78d362f4c7ea16bad20ff993bc8 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T06:11:51Z |
| publishDate | 2022-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-b0d1d78d362f4c7ea16bad20ff993bc82023-12-03T11:58:18ZengMDPI AGMicromachines2072-666X2022-07-01137115510.3390/mi13071155Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated PhotonicsDesheng Zeng0Qiang Liu1Chenyang Mei2Hongwei Li3Qingzhong Huang4Xinliang Zhang5Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, ChinaA reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10<sup>6</sup>, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 10<sup>6</sup>, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of −17.0 dB is achieved at a pump power of 6.50 dBm.https://www.mdpi.com/2072-666X/13/7/1155Q-factorSOI microring resonatorfour-wave mixingconversion efficiency |
| spellingShingle | Desheng Zeng Qiang Liu Chenyang Mei Hongwei Li Qingzhong Huang Xinliang Zhang Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics Micromachines Q-factor SOI microring resonator four-wave mixing conversion efficiency |
| title | Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics |
| title_full | Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics |
| title_fullStr | Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics |
| title_full_unstemmed | Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics |
| title_short | Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics |
| title_sort | demonstration of ultra high q silicon microring resonators for nonlinear integrated photonics |
| topic | Q-factor SOI microring resonator four-wave mixing conversion efficiency |
| url | https://www.mdpi.com/2072-666X/13/7/1155 |
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