Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10<sup>6</...

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Bibliographic Details
Main Authors: Desheng Zeng, Qiang Liu, Chenyang Mei, Hongwei Li, Qingzhong Huang, Xinliang Zhang
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
Q-factor
SOI microring resonator
four-wave mixing
conversion efficiency
Online Access:https://www.mdpi.com/2072-666X/13/7/1155

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