Near-Plasma Chemical Surface Engineering

Near-Plasma Chemical Surface Engineering

As a new trend in plasma surface engineering, plasma conditions that allow more-defined chemical reactions at the surface are being increasingly investigated. This is achieved by avoiding high energy deposition via ion bombardment during direct plasma exposure (DPE) causing destruction, densificatio...

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Bibliographic Details
Main Authors:	Paula Navascués, Urs Schütz, Barbara Hanselmann, Dirk Hegemann
Format:	Article
Language:	English
Published:	MDPI AG 2024-01-01
Series:	Nanomaterials
Subjects:	low-pressure plasma plasma etching plasma polymerization surface reactions wettability porous SiOx
Online Access:	https://www.mdpi.com/2079-4991/14/2/195

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