Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2021-08-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.1c03604 |
| _version_ | 1818426253961592832 |
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| author | Kazuhisa Sato Hirotaro Mori |
| author_facet | Kazuhisa Sato Hirotaro Mori |
| author_sort | Kazuhisa Sato |
| collection | DOAJ |
| first_indexed | 2024-12-14T14:26:54Z |
| format | Article |
| id | doaj.art-b14943332d9945e38ea6533832cf7cf9 |
| institution | Directory Open Access Journal |
| issn | 2470-1343 |
| language | English |
| last_indexed | 2024-12-14T14:26:54Z |
| publishDate | 2021-08-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj.art-b14943332d9945e38ea6533832cf7cf92022-12-21T22:57:56ZengAmerican Chemical SocietyACS Omega2470-13432021-08-01633218372184110.1021/acsomega.1c03604Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron IrradiationKazuhisa SatoHirotaro Morihttps://doi.org/10.1021/acsomega.1c03604 |
| spellingShingle | Kazuhisa Sato Hirotaro Mori Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation ACS Omega |
| title | Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation |
| title_full | Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation |
| title_fullStr | Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation |
| title_full_unstemmed | Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation |
| title_short | Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation |
| title_sort | athermal solid phase reaction in pt siox thin films induced by electron irradiation |
| url | https://doi.org/10.1021/acsomega.1c03604 |
| work_keys_str_mv | AT kazuhisasato athermalsolidphasereactioninptsioxthinfilmsinducedbyelectronirradiation AT hirotaromori athermalsolidphasereactioninptsioxthinfilmsinducedbyelectronirradiation |