Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation

Athermal Solid Phase Reaction in Pt/SiOx Thin Films Induced by Electron Irradiation

Bibliographic Details
Main Authors:	Kazuhisa Sato, Hirotaro Mori
Format:	Article
Language:	English
Published:	American Chemical Society 2021-08-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.1c03604

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