Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

We report our results on highly textured aluminum nitride (AlN) thin films deposited on glass substrates, oriented along the c-axis, using DC-magnetron sputtering technique for different values of back pressure. The structural, electronic, optical, piezoelectric, dielectric, and elastic properties o...

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Bibliographic Details
Main Authors: A. M. Alsaad, Qais M. Al-Bataineh, I. A. Qattan, Ahmad A. Ahmad, A. Ababneh, Zaid Albataineh, Ihsan A. Aljarrah, Ahmad Telfah
Format: Article
Language:English
Published: Frontiers Media S.A. 2020-05-01
Series:Frontiers in Physics
Subjects:
AlN thin films
optical
electronic
mechanical
physical tensors
hybrid functional HSE06
Online Access:https://www.frontiersin.org/article/10.3389/fphy.2020.00115/full

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