Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor

We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechan...

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Main Authors: Junji SONE, Toshinari MIZUMA, Shunsuke MOCHIZUKI, Edin SARAJLIC, Christophe YAMAHATA, Hiroyuki FUJITA
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2010-09-01
Series:Journal of Advanced Mechanical Design, Systems, and Manufacturing
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/en
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author Junji SONE
Toshinari MIZUMA
Shunsuke MOCHIZUKI
Edin SARAJLIC
Christophe YAMAHATA
Hiroyuki FUJITA
author_facet Junji SONE
Toshinari MIZUMA
Shunsuke MOCHIZUKI
Edin SARAJLIC
Christophe YAMAHATA
Hiroyuki FUJITA
author_sort Junji SONE
collection DOAJ
description We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor.
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language English
last_indexed 2024-04-12T08:43:03Z
publishDate 2010-09-01
publisher The Japan Society of Mechanical Engineers
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series Journal of Advanced Mechanical Design, Systems, and Manufacturing
spelling doaj.art-b19a0ee2c50e473cab1b661167ebb4ad2022-12-22T03:39:48ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542010-09-01461133114410.1299/jamdsm.4.1133jamdsmParameter Optimization and Electrode Improvement of Rotary Stepper MicromotorJunji SONE0Toshinari MIZUMA1Shunsuke MOCHIZUKI2Edin SARAJLIC3Christophe YAMAHATA4Hiroyuki FUJITA5Tokyo Polytechnic UniversityTokyo Polytechnic UniversityMathematical Systems, Inc.The University of TokyoThe University of TokyoThe University of TokyoWe developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor.https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/enmemscircuit simulationmicromotorfem analysisparameter design.
spellingShingle Junji SONE
Toshinari MIZUMA
Shunsuke MOCHIZUKI
Edin SARAJLIC
Christophe YAMAHATA
Hiroyuki FUJITA
Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
Journal of Advanced Mechanical Design, Systems, and Manufacturing
mems
circuit simulation
micromotor
fem analysis
parameter design.
title Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
title_full Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
title_fullStr Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
title_full_unstemmed Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
title_short Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
title_sort parameter optimization and electrode improvement of rotary stepper micromotor
topic mems
circuit simulation
micromotor
fem analysis
parameter design.
url https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/en
work_keys_str_mv AT junjisone parameteroptimizationandelectrodeimprovementofrotarysteppermicromotor
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AT shunsukemochizuki parameteroptimizationandelectrodeimprovementofrotarysteppermicromotor
AT edinsarajlic parameteroptimizationandelectrodeimprovementofrotarysteppermicromotor
AT christopheyamahata parameteroptimizationandelectrodeimprovementofrotarysteppermicromotor
AT hiroyukifujita parameteroptimizationandelectrodeimprovementofrotarysteppermicromotor