Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechan...
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Format: | Article |
Language: | English |
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The Japan Society of Mechanical Engineers
2010-09-01
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Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/en |
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author | Junji SONE Toshinari MIZUMA Shunsuke MOCHIZUKI Edin SARAJLIC Christophe YAMAHATA Hiroyuki FUJITA |
author_facet | Junji SONE Toshinari MIZUMA Shunsuke MOCHIZUKI Edin SARAJLIC Christophe YAMAHATA Hiroyuki FUJITA |
author_sort | Junji SONE |
collection | DOAJ |
description | We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor. |
first_indexed | 2024-04-12T08:43:03Z |
format | Article |
id | doaj.art-b19a0ee2c50e473cab1b661167ebb4ad |
institution | Directory Open Access Journal |
issn | 1881-3054 |
language | English |
last_indexed | 2024-04-12T08:43:03Z |
publishDate | 2010-09-01 |
publisher | The Japan Society of Mechanical Engineers |
record_format | Article |
series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
spelling | doaj.art-b19a0ee2c50e473cab1b661167ebb4ad2022-12-22T03:39:48ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542010-09-01461133114410.1299/jamdsm.4.1133jamdsmParameter Optimization and Electrode Improvement of Rotary Stepper MicromotorJunji SONE0Toshinari MIZUMA1Shunsuke MOCHIZUKI2Edin SARAJLIC3Christophe YAMAHATA4Hiroyuki FUJITA5Tokyo Polytechnic UniversityTokyo Polytechnic UniversityMathematical Systems, Inc.The University of TokyoThe University of TokyoThe University of TokyoWe developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor.https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/enmemscircuit simulationmicromotorfem analysisparameter design. |
spellingShingle | Junji SONE Toshinari MIZUMA Shunsuke MOCHIZUKI Edin SARAJLIC Christophe YAMAHATA Hiroyuki FUJITA Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor Journal of Advanced Mechanical Design, Systems, and Manufacturing mems circuit simulation micromotor fem analysis parameter design. |
title | Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor |
title_full | Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor |
title_fullStr | Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor |
title_full_unstemmed | Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor |
title_short | Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor |
title_sort | parameter optimization and electrode improvement of rotary stepper micromotor |
topic | mems circuit simulation micromotor fem analysis parameter design. |
url | https://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1133/_pdf/-char/en |
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