Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures
Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study,...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/22/3951 |
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| author | Hoang-Lam Pham Thomas Alcaire Sebastien Soulan Delphine Le Cunff Jean-Hervé Tortai |
| author_facet | Hoang-Lam Pham Thomas Alcaire Sebastien Soulan Delphine Le Cunff Jean-Hervé Tortai |
| author_sort | Hoang-Lam Pham |
| collection | DOAJ |
| description | Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagations in the component layers are characterized by local scattering matrices (s-matrices), which are efficiently computed and integrated into the global s-matrix of the structures to describe the optical responses. The performance of our work is demonstrated through three-dimensional (3D) multilayer nanohole structures in the practical case of industrial Muller matrix measurements of optical diffusers. Another case of plasmonic biosensing is also used to validate our work in simulating full optical responses. The results show significant numerical improvements for the examples, demonstrating the gain in using the RCWA method to address the metrological studies of multilayer nanodevices. |
| first_indexed | 2024-03-09T18:06:16Z |
| format | Article |
| id | doaj.art-b1d4d79b5daa47ed99287737b08d66c0 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T18:06:16Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-b1d4d79b5daa47ed99287737b08d66c02023-11-24T09:27:12ZengMDPI AGNanomaterials2079-49912022-11-011222395110.3390/nano12223951Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer NanostructuresHoang-Lam Pham0Thomas Alcaire1Sebastien Soulan2Delphine Le Cunff3Jean-Hervé Tortai4LTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, FranceSTMicroelectronics, 38920 Crolles, FranceLTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, FranceSTMicroelectronics, 38920 Crolles, FranceLTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, FranceMueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagations in the component layers are characterized by local scattering matrices (s-matrices), which are efficiently computed and integrated into the global s-matrix of the structures to describe the optical responses. The performance of our work is demonstrated through three-dimensional (3D) multilayer nanohole structures in the practical case of industrial Muller matrix measurements of optical diffusers. Another case of plasmonic biosensing is also used to validate our work in simulating full optical responses. The results show significant numerical improvements for the examples, demonstrating the gain in using the RCWA method to address the metrological studies of multilayer nanodevices.https://www.mdpi.com/2079-4991/12/22/3951Mueller matrix ellipsometryRCWA3D multilayer nanostructuresscattering matrix |
| spellingShingle | Hoang-Lam Pham Thomas Alcaire Sebastien Soulan Delphine Le Cunff Jean-Hervé Tortai Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures Nanomaterials Mueller matrix ellipsometry RCWA 3D multilayer nanostructures scattering matrix |
| title | Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures |
| title_full | Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures |
| title_fullStr | Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures |
| title_full_unstemmed | Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures |
| title_short | Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures |
| title_sort | efficient rigorous coupled wave analysis simulation of mueller matrix ellipsometry of three dimensional multilayer nanostructures |
| topic | Mueller matrix ellipsometry RCWA 3D multilayer nanostructures scattering matrix |
| url | https://www.mdpi.com/2079-4991/12/22/3951 |
| work_keys_str_mv | AT hoanglampham efficientrigorouscoupledwaveanalysissimulationofmuellermatrixellipsometryofthreedimensionalmultilayernanostructures AT thomasalcaire efficientrigorouscoupledwaveanalysissimulationofmuellermatrixellipsometryofthreedimensionalmultilayernanostructures AT sebastiensoulan efficientrigorouscoupledwaveanalysissimulationofmuellermatrixellipsometryofthreedimensionalmultilayernanostructures AT delphinelecunff efficientrigorouscoupledwaveanalysissimulationofmuellermatrixellipsometryofthreedimensionalmultilayernanostructures AT jeanhervetortai efficientrigorouscoupledwaveanalysissimulationofmuellermatrixellipsometryofthreedimensionalmultilayernanostructures |