Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis

Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis

In the present study, the sputtered aluminum nitride (AlN) films were processed in a reactive pulsed DC magnetron system. We applied a total of 15 different design of experiments (DOEs) on DC pulsed parameters (reverse voltage, pulse frequency, and duty cycle) with Box–Behnken experimental method an...

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Bibliographic Details
Main Authors: Wei-Yu Zhou, Hsuan-Fan Chen, Xue-Li Tseng, Hsiao-Han Lo, Peter J. Wang, Ming-Yu Jiang, Yiin-Kuen Fuh, Tomi T. Li
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Materials
Subjects:
Reactive pulsed DC magnetron sputtering
AlN
BoxBehnken method
Pulse parameter
In-situ OES
PCA
Online Access:https://www.mdpi.com/1996-1944/16/8/3015

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