Kinetics of electrons and neutral particles in radio-frequency transformer coupled plasma H− ion source at Seoul National University
In volume production H ^− ion sources, control of electron temperature is essential due to its close correlation with the generation of vibrationally-excited hydrogen molecules in the driver region as well as the generation of H ^− ions by dissociative attachment in the extraction region. In the ion...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2016-01-01
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| Series: | New Journal of Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/1367-2630/18/10/105006 |