Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers

Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers

Deriving mesoporous ZnO from calcinated, molecular layer deposited (MLD) metal-organic hybrid thin films offers various advantages, e.g., tunable crystallinity and porosity, as well as great film conformality and thickness control. However, such methods have barely been investigated. In this contrib...

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Bibliographic Details
Main Authors:	Richard Berger, Martin Seiler, Alberto Perrotta, Anna Maria Coclite
Format:	Article
Language:	English
Published:	MDPI AG 2021-03-01
Series:	Materials
Subjects:	molecular layer deposition porosimetric ellipsometry porous materials zinc oxide
Online Access:	https://www.mdpi.com/1996-1944/14/6/1418

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