Mechanical Properties and Corrosion Resistance of NbTiAlSiZrN<sub>x</sub> High-Entropy Films Prepared by RF Magnetron Sputtering

Mechanical Properties and Corrosion Resistance of NbTiAlSiZrN<sub>x</sub> High-Entropy Films Prepared by RF Magnetron Sputtering

In this study, we designed and fabricated NbTiAlSiZrN<sub>x</sub> high-entropy alloy (HEA) films. The parameters of the radio frequency (RF) pulse magnetron sputtering process were fixed to maintain the N<sub>2</sub> flux ratio at 0%, 10%, 20%, 30%, 40%, and 50%. Subsequently...

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Bibliographic Details
Main Authors: Qiuwei Xing, Haijiang Wang, Mingbiao Chen, Zhaoyun Chen, Rongbin Li, Peipeng Jin, Yong Zhang
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Entropy
Subjects:
thin films
high-entropy alloy films
hardness
corrosion-resistance
Online Access:https://www.mdpi.com/1099-4300/21/4/396

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