Breakthroughs in Photonics 2013: X-Ray Optics

Breakthroughs in Photonics 2013: X-Ray Optics

This review discusses the latest advances in extreme ultraviolet/X-ray optics development, which are motivated by the availability and demands of new X-ray sources and scientific and industrial applications. Among the breakthroughs highlighted are the following: i) fabrication, metrology, and mounti...

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Bibliographic Details
Main Author:	Regina Soufli
Format:	Article
Language:	English
Published:	IEEE 2014-01-01
Series:	IEEE Photonics Journal
Subjects:	X-ray optics multilayer interference coatings metrology EUV X-ray applications
Online Access:	https://ieeexplore.ieee.org/document/6807862/

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