Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2013-12-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/13/12/16657 |
| _version_ | 1828390850706538496 |
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| author | Valeria Toffoli Sergio Carrato Dongkyu Lee Sangmin Jeon Marco Lazzarino |
| author_facet | Valeria Toffoli Sergio Carrato Dongkyu Lee Sangmin Jeon Marco Lazzarino |
| author_sort | Valeria Toffoli |
| collection | DOAJ |
| description | The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems. |
| first_indexed | 2024-12-10T06:53:08Z |
| format | Article |
| id | doaj.art-b333119bacfe43529f23e6ce8908c469 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T06:53:08Z |
| publishDate | 2013-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-b333119bacfe43529f23e6ce8908c4692022-12-22T01:58:30ZengMDPI AGSensors1424-82202013-12-011312166571667110.3390/s131216657s131216657Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric AnalysisValeria Toffoli0Sergio Carrato1Dongkyu Lee2Sangmin Jeon3Marco Lazzarino4IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, ItalyDIA-Università di Trieste, Via Valerio, Trieste 10-34127, ItalyUniversity of Alberta, 116 St and 85 Ave, Edmonton, Alberta T6G 2R3, CanadaDepartment of Chemical Engineering, Pohang University of Science and Technology, Pohang 790-784, KoreaIOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, ItalyThe design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.http://www.mdpi.com/1424-8220/13/12/16657microelectromechanical system (MEMS) resonatormass sensingthermogravimetric analysis (TGA)microcapsules |
| spellingShingle | Valeria Toffoli Sergio Carrato Dongkyu Lee Sangmin Jeon Marco Lazzarino Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis Sensors microelectromechanical system (MEMS) resonator mass sensing thermogravimetric analysis (TGA) microcapsules |
| title | Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis |
| title_full | Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis |
| title_fullStr | Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis |
| title_full_unstemmed | Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis |
| title_short | Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis |
| title_sort | heater integrated cantilevers for nano samples thermogravimetric analysis |
| topic | microelectromechanical system (MEMS) resonator mass sensing thermogravimetric analysis (TGA) microcapsules |
| url | http://www.mdpi.com/1424-8220/13/12/16657 |
| work_keys_str_mv | AT valeriatoffoli heaterintegratedcantileversfornanosamplesthermogravimetricanalysis AT sergiocarrato heaterintegratedcantileversfornanosamplesthermogravimetricanalysis AT dongkyulee heaterintegratedcantileversfornanosamplesthermogravimetricanalysis AT sangminjeon heaterintegratedcantileversfornanosamplesthermogravimetricanalysis AT marcolazzarino heaterintegratedcantileversfornanosamplesthermogravimetricanalysis |