Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater...

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Bibliographic Details
Main Authors:	Valeria Toffoli, Sergio Carrato, Dongkyu Lee, Sangmin Jeon, Marco Lazzarino
Format:	Article
Language:	English
Published:	MDPI AG 2013-12-01
Series:	Sensors
Subjects:	microelectromechanical system (MEMS) resonator mass sensing thermogravimetric analysis (TGA) microcapsules
Online Access:	http://www.mdpi.com/1424-8220/13/12/16657

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