PPC-based wafer-level temporary bonding/ debonding triggered by microwave
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MIDEM Society - Society for Microelectronics, Electronic Components and Materials
2024-02-01
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| Series: | Informacije MIDEM |
| Online Access: | http://www.midem-drustvo.si/Journal%20papers/MIDEM_53(2024)4p2.pdf |
| _version_ | 1827352460349407232 |
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| author | Q. Yang Z. Lin Z. Zhu |
| author_facet | Q. Yang Z. Lin Z. Zhu |
| author_sort | Q. Yang |
| collection | DOAJ |
| first_indexed | 2024-03-08T03:06:13Z |
| format | Article |
| id | doaj.art-b3e3d671ab944c4f9716584464a83865 |
| institution | Directory Open Access Journal |
| issn | 0352-9045 2232-6979 |
| language | English |
| last_indexed | 2024-03-08T03:06:13Z |
| publishDate | 2024-02-01 |
| publisher | MIDEM Society - Society for Microelectronics, Electronic Components and Materials |
| record_format | Article |
| series | Informacije MIDEM |
| spelling | doaj.art-b3e3d671ab944c4f9716584464a838652024-02-13T09:51:31ZengMIDEM Society - Society for Microelectronics, Electronic Components and MaterialsInformacije MIDEM0352-90452232-69792024-02-0153420https://doi.org/10.33180/InfMIDEM2023.402PPC-based wafer-level temporary bonding/ debonding triggered by microwaveQ. YangZ. LinZ. Zhuhttp://www.midem-drustvo.si/Journal%20papers/MIDEM_53(2024)4p2.pdf |
| spellingShingle | Q. Yang Z. Lin Z. Zhu PPC-based wafer-level temporary bonding/ debonding triggered by microwave Informacije MIDEM |
| title | PPC-based wafer-level temporary bonding/ debonding triggered by microwave |
| title_full | PPC-based wafer-level temporary bonding/ debonding triggered by microwave |
| title_fullStr | PPC-based wafer-level temporary bonding/ debonding triggered by microwave |
| title_full_unstemmed | PPC-based wafer-level temporary bonding/ debonding triggered by microwave |
| title_short | PPC-based wafer-level temporary bonding/ debonding triggered by microwave |
| title_sort | ppc based wafer level temporary bonding debonding triggered by microwave |
| url | http://www.midem-drustvo.si/Journal%20papers/MIDEM_53(2024)4p2.pdf |
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