FORMATION OF LUMINESCENT NANOCRYSTALLINE SILICON FILMS FROM A-SI:H BY USING RAPID THERMAL ANNEALING AND WET CHEMICAL ETCHING

FORMATION OF LUMINESCENT NANOCRYSTALLINE SILICON FILMS FROM A-SI:H BY USING RAPID THERMAL ANNEALING AND WET CHEMICAL ETCHING

Nanocrystalline silicon films, which exhibit efficient photoluminescence, were formed from amorphous films of hydrogenated silicon subjected to rapid thermal annealing and stain etching in hydrofluoric acid based solutions. The samples were investigated by means of scanning and transmission electron...

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Détails bibliographiques
Auteurs principaux:	Ye. T. Taurbayev, K. K. Dihanbayev, V. E. Nikulin, E. A. Svanbayev, T. I. Taurbayev, Yu. Timoshenko, N. E. Maslova, K. A. Gonchar
Format:	Article
Langue:	English
Publié:	Al-Farabi Kazakh National University 2009-12-01
Collection:	Вестник. Серия физическая
Accès en ligne:	https://bph.kaznu.kz/index.php/zhuzhu/article/view/228

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