Enhanced Deep Ultraviolet Photoresponse in Ga doped ZnMgO Thin Film

Enhanced Deep Ultraviolet Photoresponse in Ga doped ZnMgO Thin Film

High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device’s performance were carefully studied by various experimental methods. The investigations...

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Bibliographic Details
Main Authors:	Mao Ye, Dongbo Wang, Shujie Jiao, Lang Chen
Format:	Article
Language:	English
Published:	MDPI AG 2022-07-01
Series:	Micromachines
Subjects:	deep-UV ZnMgO Ga dope Ga<sub>2</sub>O<sub>3</sub> magnetron sputtering
Online Access:	https://www.mdpi.com/2072-666X/13/7/1140

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