Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM
The acoustic properties of QCM microbalances based on a La3Ga5SiO14 crystal (LGS) were studied using scanning electron microscopy technique. Scanning electron microscopy method in the low-energy secondary electron emission mode makes it possible to visualize the distribution of the acoustic wave fie...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2019-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/november_2019/Vol_238/P_3129.pdf |
| _version_ | 1797770696454045696 |
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| author | Dmitry ROSHCHUPKIN Evgenii EMELIN Olga PLOTITCYNA Sergei SAKHAROV |
| author_facet | Dmitry ROSHCHUPKIN Evgenii EMELIN Olga PLOTITCYNA Sergei SAKHAROV |
| author_sort | Dmitry ROSHCHUPKIN |
| collection | DOAJ |
| description | The acoustic properties of QCM microbalances based on a La3Ga5SiO14 crystal (LGS) were studied using scanning electron microscopy technique. Scanning electron microscopy method in the low-energy secondary electron emission mode makes it possible to visualize the distribution of the acoustic wave field in the QCM (distribution of nodes and antinodes of standing bulk acoustic wave in crystal) in the real time mode.
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| first_indexed | 2024-03-12T21:25:58Z |
| format | Article |
| id | doaj.art-b47890b31bae4a629229945d51971849 |
| institution | Directory Open Access Journal |
| issn | 2306-8515 1726-5479 |
| language | English |
| last_indexed | 2024-03-12T21:25:58Z |
| publishDate | 2019-11-01 |
| publisher | IFSA Publishing, S.L. |
| record_format | Article |
| series | Sensors & Transducers |
| spelling | doaj.art-b47890b31bae4a629229945d519718492023-07-28T08:44:23ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792019-11-01238111620Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCMDmitry ROSHCHUPKIN0Evgenii EMELIN1Olga PLOTITCYNA2Sergei SAKHAROV3Institute of Microelectronics Technology and High Purity Materials Russian Academy of SciencesInstitute of Microelectronics Technology and High Purity Materials Russian Academy of SciencesInstitute of Microelectronics Technology and High Purity Materials Russian Academy of SciencesFOMOS Materials Co.The acoustic properties of QCM microbalances based on a La3Ga5SiO14 crystal (LGS) were studied using scanning electron microscopy technique. Scanning electron microscopy method in the low-energy secondary electron emission mode makes it possible to visualize the distribution of the acoustic wave field in the QCM (distribution of nodes and antinodes of standing bulk acoustic wave in crystal) in the real time mode. https://sensorsportal.com/HTML/DIGEST/november_2019/Vol_238/P_3129.pdfla3ga5sio14 crystalscanning electron microscopybulk acoustic wavesqcmmicrobalance |
| spellingShingle | Dmitry ROSHCHUPKIN Evgenii EMELIN Olga PLOTITCYNA Sergei SAKHAROV Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM Sensors & Transducers la3ga5sio14 crystal scanning electron microscopy bulk acoustic waves qcm microbalance |
| title | Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM |
| title_full | Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM |
| title_fullStr | Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM |
| title_full_unstemmed | Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM |
| title_short | Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM |
| title_sort | scanning electron microscopy imaging of acoustic wave fields distribution in qcm |
| topic | la3ga5sio14 crystal scanning electron microscopy bulk acoustic waves qcm microbalance |
| url | https://sensorsportal.com/HTML/DIGEST/november_2019/Vol_238/P_3129.pdf |
| work_keys_str_mv | AT dmitryroshchupkin scanningelectronmicroscopyimagingofacousticwavefieldsdistributioninqcm AT evgeniiemelin scanningelectronmicroscopyimagingofacousticwavefieldsdistributioninqcm AT olgaplotitcyna scanningelectronmicroscopyimagingofacousticwavefieldsdistributioninqcm AT sergeisakharov scanningelectronmicroscopyimagingofacousticwavefieldsdistributioninqcm |