Design Guideline for a Cantilever-Type MEMS Switch with High Contact Force
Micromechanical switches are of significant interest for advanced radio frequency and microwave systems, but their practical implementation is limited by low reliability. Electrodes of a microscopic size develop weak contact force that leads to high and unstable contact resistance. The force is typi...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-12-01
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| Series: | Micro |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8023/4/1/1 |