APA (7th ed.) Citation

Liu, D., Chen, P., Chou, T., Hu, H., & Chen, K. (2021). Demonstration of Low-Temperature Fine-Pitch Cu/SiO₂ Hybrid Bonding by Au Passivation. IEEE.

Chicago Style (17th ed.) Citation

Liu, Demin, Po-Chih Chen, Tzu-Chieh Chou, Han-Wen Hu, and Kuan-Neng Chen. Demonstration of Low-Temperature Fine-Pitch Cu/SiO₂ Hybrid Bonding by Au Passivation. IEEE, 2021.

MLA (9th ed.) Citation

Liu, Demin, et al. Demonstration of Low-Temperature Fine-Pitch Cu/SiO₂ Hybrid Bonding by Au Passivation. IEEE, 2021.