Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically d...

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Bibliographic Details
Main Authors: Rui Hao, Huijun Yu, Bei Peng, Haixiang Zhan, Wu Zhou
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Sensors
Subjects:
micro vibratory platform
inertial sensor calibration
residual stress
PZT hysteresis
Online Access:https://www.mdpi.com/1424-8220/20/14/3959

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