Transfer-free, lithography-free, and micrometer-precision patterning of CVD graphene on SiO2 toward all-carbon electronics

Transfer-free, lithography-free, and micrometer-precision patterning of CVD graphene on SiO2 toward all-carbon electronics

A method of producing large area continuous graphene directly on SiO2 by chemical vapor deposition is systematically developed. Cu thin film catalysts are sputtered onto the SiO2 and pre-patterned. During graphene deposition, high temperature induces evaporation and balling of the Cu, and the graphe...

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Bibliographic Details
Main Authors: Yibo Dong, Yiyang Xie, Chen Xu, Xuejian Li, Jun Deng, Xing Fan, Guanzhong Pan, Qiuhua Wang, Fangzhu Xiong, Yafei Fu, Jie Sun
Format: Article
Language:English
Published: AIP Publishing LLC 2018-02-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4992077

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