Electrochemically assisted localized etching of ZnO single crystals in water using a catalytically active Pt-coated atomic force microscopy probe
This paper presents a nanofabrication technique based on the electrochemically assisted chemical dissolution of zinc oxide (ZnO) single crystals in water at room temperature using a catalytically active Pt-coated atomic force microscopy (AFM) probe. Fabricated grooves featured depths and widths of s...
Main Authors: | Takayuki Shibata, Kota Yamamoto, Junji Sasano, Moeto Nagai |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-09-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4993839 |
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