Optical Temperature Sensor Based on Polysilicon Waveguides
Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si)...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/23/9357 |
| _version_ | 1797462134095872000 |
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| author | Xinru Xu Yuexin Yin Chunlei Sun Lan Li Hongtao Lin Bo Tang Peng Zhang Changming Chen Daming Zhang |
| author_facet | Xinru Xu Yuexin Yin Chunlei Sun Lan Li Hongtao Lin Bo Tang Peng Zhang Changming Chen Daming Zhang |
| author_sort | Xinru Xu |
| collection | DOAJ |
| description | Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications. |
| first_indexed | 2024-03-09T17:32:11Z |
| format | Article |
| id | doaj.art-b61dd4a205c94639a173e2a017e15c35 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T17:32:11Z |
| publishDate | 2022-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-b61dd4a205c94639a173e2a017e15c352023-11-24T12:12:52ZengMDPI AGSensors1424-82202022-12-012223935710.3390/s22239357Optical Temperature Sensor Based on Polysilicon WaveguidesXinru Xu0Yuexin Yin1Chunlei Sun2Lan Li3Hongtao Lin4Bo Tang5Peng Zhang6Changming Chen7Daming Zhang8State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, ChinaKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, ChinaState Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaTraditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.https://www.mdpi.com/1424-8220/22/23/9357temperature sensorspolysilicondual-microring resonatorAMZI |
| spellingShingle | Xinru Xu Yuexin Yin Chunlei Sun Lan Li Hongtao Lin Bo Tang Peng Zhang Changming Chen Daming Zhang Optical Temperature Sensor Based on Polysilicon Waveguides Sensors temperature sensors polysilicon dual-microring resonator AMZI |
| title | Optical Temperature Sensor Based on Polysilicon Waveguides |
| title_full | Optical Temperature Sensor Based on Polysilicon Waveguides |
| title_fullStr | Optical Temperature Sensor Based on Polysilicon Waveguides |
| title_full_unstemmed | Optical Temperature Sensor Based on Polysilicon Waveguides |
| title_short | Optical Temperature Sensor Based on Polysilicon Waveguides |
| title_sort | optical temperature sensor based on polysilicon waveguides |
| topic | temperature sensors polysilicon dual-microring resonator AMZI |
| url | https://www.mdpi.com/1424-8220/22/23/9357 |
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