Plasma-Induced Surface Modification of Sapphire and Its Influence on Graphene Grown by Plasma-Enhanced Chemical Vapour Deposition

Plasma-Induced Surface Modification of Sapphire and Its Influence on Graphene Grown by Plasma-Enhanced Chemical Vapour Deposition

In this work, we study the influence of the different surface terminations of c-plane sapphire substrates on the synthesis of graphene via plasma-enhanced chemical vapor deposition. The different terminations of the sapphire surface are controlled by a plasma process. A design of experiments procedu...

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Bibliographic Details
Main Authors: Miguel Sinusia Lozano, Ignacio Bernat-Montoya, Todora Ivanova Angelova, Alberto Boscá Mojena, Francisco J. Díaz-Fernández, Miroslavna Kovylina, Alejandro Martínez, Elena Pinilla Cienfuegos, Víctor J. Gómez
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Nanomaterials
Subjects:
surface plasma treatment
graphene
sapphire surface
plasma enhanced chemical vapor deposition
Online Access:https://www.mdpi.com/2079-4991/13/13/1952

Internet

https://www.mdpi.com/2079-4991/13/13/1952

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