MEMS Acoustic Emission Sensors
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE s...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-12-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/10/24/8966 |
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| author | Didem Ozevin |
| author_facet | Didem Ozevin |
| author_sort | Didem Ozevin |
| collection | DOAJ |
| description | This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook. |
| first_indexed | 2024-03-10T14:03:14Z |
| format | Article |
| id | doaj.art-b6ea8ec3dd5c4eaa8a8a9ccc43443af6 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T14:03:14Z |
| publishDate | 2020-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-b6ea8ec3dd5c4eaa8a8a9ccc43443af62023-11-21T00:59:04ZengMDPI AGApplied Sciences2076-34172020-12-011024896610.3390/app10248966MEMS Acoustic Emission SensorsDidem Ozevin0Civil, Materials and Environmental Engineering, University of Illinois at Chicago, Chicago, IL 60607, USAThis paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.https://www.mdpi.com/2076-3417/10/24/8966MEMSacoustic emissionpiezoresistivecapacitivepiezoelectric |
| spellingShingle | Didem Ozevin MEMS Acoustic Emission Sensors Applied Sciences MEMS acoustic emission piezoresistive capacitive piezoelectric |
| title | MEMS Acoustic Emission Sensors |
| title_full | MEMS Acoustic Emission Sensors |
| title_fullStr | MEMS Acoustic Emission Sensors |
| title_full_unstemmed | MEMS Acoustic Emission Sensors |
| title_short | MEMS Acoustic Emission Sensors |
| title_sort | mems acoustic emission sensors |
| topic | MEMS acoustic emission piezoresistive capacitive piezoelectric |
| url | https://www.mdpi.com/2076-3417/10/24/8966 |
| work_keys_str_mv | AT didemozevin memsacousticemissionsensors |