Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys
In this paper, a real-time diagnostic based on the spectral-domain optical coherence technique has been developed to measure the hole depth during femtosecond laser drilling. This diagnostic borrows the idea of a fiber interferometer, and the hole is integrated as a part of the sample arm. By means...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0135004 |
| _version_ | 1797771921542086656 |
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| author | P. Xu Y. Yu R. J. Liu K. Zha L. Zhou Y. T. Liu Z. Xu |
| author_facet | P. Xu Y. Yu R. J. Liu K. Zha L. Zhou Y. T. Liu Z. Xu |
| author_sort | P. Xu |
| collection | DOAJ |
| description | In this paper, a real-time diagnostic based on the spectral-domain optical coherence technique has been developed to measure the hole depth during femtosecond laser drilling. This diagnostic borrows the idea of a fiber interferometer, and the hole is integrated as a part of the sample arm. By means of investigating the interference fringes detected by the line camera, the hole depth can be extracted. This diagnostic utilizes a broadband small-volume super-luminescent diode as the coherent light source, which has a central wavelength of 833 nm and a full width at half maximum of 24 nm. It has a temporal resolution of 50 µs and a maximal theoretic depth resolution of 12.8 µm. Three kinds of metal samples have been tested, confirming the ability of depth measurement. Copper has been proven to have the best-normalized reflectivity during drilling compared with aluminum alloy and stainless steel. |
| first_indexed | 2024-03-12T21:44:38Z |
| format | Article |
| id | doaj.art-b75d7c1cac3a4a4c8d8fa0ca53aefc3d |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-03-12T21:44:38Z |
| publishDate | 2023-03-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-b75d7c1cac3a4a4c8d8fa0ca53aefc3d2023-07-26T14:03:57ZengAIP Publishing LLCAIP Advances2158-32262023-03-01133035006035006-610.1063/5.0135004Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloysP. Xu0Y. Yu1R. J. Liu2K. Zha3L. Zhou4Y. T. Liu5Z. Xu6School of Physics, Xihua University, Chengdu 610039, ChinaSino-French Institute of Nuclear Engineering and Technology, Sun Yat-sen University, Zhuhai 519082, ChinaSchool of Physics, Xihua University, Chengdu 610039, ChinaSchool of Physics, Xihua University, Chengdu 610039, ChinaSchool of Physics, Xihua University, Chengdu 610039, ChinaSchool of Physics, Xihua University, Chengdu 610039, ChinaSchool of Physics, Xihua University, Chengdu 610039, ChinaIn this paper, a real-time diagnostic based on the spectral-domain optical coherence technique has been developed to measure the hole depth during femtosecond laser drilling. This diagnostic borrows the idea of a fiber interferometer, and the hole is integrated as a part of the sample arm. By means of investigating the interference fringes detected by the line camera, the hole depth can be extracted. This diagnostic utilizes a broadband small-volume super-luminescent diode as the coherent light source, which has a central wavelength of 833 nm and a full width at half maximum of 24 nm. It has a temporal resolution of 50 µs and a maximal theoretic depth resolution of 12.8 µm. Three kinds of metal samples have been tested, confirming the ability of depth measurement. Copper has been proven to have the best-normalized reflectivity during drilling compared with aluminum alloy and stainless steel.http://dx.doi.org/10.1063/5.0135004 |
| spellingShingle | P. Xu Y. Yu R. J. Liu K. Zha L. Zhou Y. T. Liu Z. Xu Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys AIP Advances |
| title | Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys |
| title_full | Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys |
| title_fullStr | Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys |
| title_full_unstemmed | Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys |
| title_short | Application of spectral-domain optical coherence tomography technique to in-process measure hole depth during femtosecond laser drilling in different alloys |
| title_sort | application of spectral domain optical coherence tomography technique to in process measure hole depth during femtosecond laser drilling in different alloys |
| url | http://dx.doi.org/10.1063/5.0135004 |
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