Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides
We demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This config...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
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AIP Publishing LLC
2018-03-01
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Series: | APL Photonics |
Online Access: | http://dx.doi.org/10.1063/1.5013662 |
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author | Boaz Sturlesi Meir Grajower Noa Mazurski Uriel Levy |
author_facet | Boaz Sturlesi Meir Grajower Noa Mazurski Uriel Levy |
author_sort | Boaz Sturlesi |
collection | DOAJ |
description | We demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This configuration offers a symmetric environment in which surface plasmon polariton modes undergo minimal loss. Furthermore, the plasmonic mode profile matches the modes of the dielectric (amorphous silicon) waveguide, thus allowing efficient coupling between silicon photonics and plasmonic platforms. The propagation length of the plasmonic waveguide was measured to be about 27 μm at the telecom wavelength around 1550 nm, in good agreement with numerical simulations. As such, the waveguide features both tight mode confinement and decent propagation length. On top of its photonic properties, placing a metal within the structure may also allow for additional functionalities such as photo-detection, thermo-optic tuning, and electro-optic control to be implemented. |
first_indexed | 2024-12-12T20:23:09Z |
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id | doaj.art-b7af13457ca743019a55e3f6e764ceb3 |
institution | Directory Open Access Journal |
issn | 2378-0967 |
language | English |
last_indexed | 2024-12-12T20:23:09Z |
publishDate | 2018-03-01 |
publisher | AIP Publishing LLC |
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series | APL Photonics |
spelling | doaj.art-b7af13457ca743019a55e3f6e764ceb32022-12-22T00:13:12ZengAIP Publishing LLCAPL Photonics2378-09672018-03-0133036103036103-910.1063/1.5013662003803APPIntegrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguidesBoaz Sturlesi0Meir Grajower1Noa Mazurski2Uriel Levy3Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, IsraelDepartment of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, IsraelDepartment of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, IsraelDepartment of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, IsraelWe demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This configuration offers a symmetric environment in which surface plasmon polariton modes undergo minimal loss. Furthermore, the plasmonic mode profile matches the modes of the dielectric (amorphous silicon) waveguide, thus allowing efficient coupling between silicon photonics and plasmonic platforms. The propagation length of the plasmonic waveguide was measured to be about 27 μm at the telecom wavelength around 1550 nm, in good agreement with numerical simulations. As such, the waveguide features both tight mode confinement and decent propagation length. On top of its photonic properties, placing a metal within the structure may also allow for additional functionalities such as photo-detection, thermo-optic tuning, and electro-optic control to be implemented.http://dx.doi.org/10.1063/1.5013662 |
spellingShingle | Boaz Sturlesi Meir Grajower Noa Mazurski Uriel Levy Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides APL Photonics |
title | Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides |
title_full | Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides |
title_fullStr | Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides |
title_full_unstemmed | Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides |
title_short | Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides |
title_sort | integrated amorphous silicon aluminum long range surface plasmon polariton lr spp waveguides |
url | http://dx.doi.org/10.1063/1.5013662 |
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