Graphene-Based Nanoscale Vacuum Channel Transistor

Graphene-Based Nanoscale Vacuum Channel Transistor

Abstract We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage an...

Full description

Bibliographic Details
Main Authors: Ji Xu, Zhuyan Gu, Wenxin Yang, Qilong Wang, Xiaobing Zhang
Format: Article
Language:English
Published: SpringerOpen 2018-10-01
Series:Nanoscale Research Letters
Subjects:
Nanoscale vacuum channel
Graphene
In situ measurement
Online Access:http://link.springer.com/article/10.1186/s11671-018-2736-6

Internet

http://link.springer.com/article/10.1186/s11671-018-2736-6

Similar Items