Calibration of Displacement Laser Interferometer Systems for Industrial Metrology

Displacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibration...

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Main Author: Han Haitjema
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/19/19/4100
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author Han Haitjema
author_facet Han Haitjema
author_sort Han Haitjema
collection DOAJ
description Displacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibrations. This paper gives a review of the calibration of such systems, where several approaches, such as the calibrations of separate components or the system as a whole, are reviewed. The calibrations discussed are: the laser frequency, the counting system, software evaluation of the environmental conditions, environmental and material temperature sensor calibration and the calibration of optics that is part of the system. For these calibrations considerations are given about the ways these can be carried out and about establishing the re-calibration intervals.
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spelling doaj.art-b86abb18a3c447ba8e33fe2c2add44c92022-12-22T02:57:03ZengMDPI AGSensors1424-82202019-09-011919410010.3390/s19194100s19194100Calibration of Displacement Laser Interferometer Systems for Industrial MetrologyHan Haitjema0Mechanical Engineering Department, KU Leuven, 3000 Leuven, BelgiumDisplacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibrations. This paper gives a review of the calibration of such systems, where several approaches, such as the calibrations of separate components or the system as a whole, are reviewed. The calibrations discussed are: the laser frequency, the counting system, software evaluation of the environmental conditions, environmental and material temperature sensor calibration and the calibration of optics that is part of the system. For these calibrations considerations are given about the ways these can be carried out and about establishing the re-calibration intervals.https://www.mdpi.com/1424-8220/19/19/4100laser interferometercalibrationtraceability
spellingShingle Han Haitjema
Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
Sensors
laser interferometer
calibration
traceability
title Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
title_full Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
title_fullStr Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
title_full_unstemmed Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
title_short Calibration of Displacement Laser Interferometer Systems for Industrial Metrology
title_sort calibration of displacement laser interferometer systems for industrial metrology
topic laser interferometer
calibration
traceability
url https://www.mdpi.com/1424-8220/19/19/4100
work_keys_str_mv AT hanhaitjema calibrationofdisplacementlaserinterferometersystemsforindustrialmetrology