High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films

Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer t...

Full description

Bibliographic Details
Main Authors: Gunnar Nelson, Chloe S. Drapes, Meagan A. Grant, Ryan Gnabasik, Jeffrey Wong, Andrew Baruth
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/9/6/271
_version_ 1818062164356759552
author Gunnar Nelson
Chloe S. Drapes
Meagan A. Grant
Ryan Gnabasik
Jeffrey Wong
Andrew Baruth
author_facet Gunnar Nelson
Chloe S. Drapes
Meagan A. Grant
Ryan Gnabasik
Jeffrey Wong
Andrew Baruth
author_sort Gunnar Nelson
collection DOAJ
description Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer to direct the self-assembly process at the nanoscale. Recent developments in both theory and experiments have directly identified critical parameters that govern this process, but controlling them in any systematic way has proven non-trivial. These identified parameters include vapor pressure, solvent concentration in the film, and the solvent evaporation rate. To explore their role, a purpose-built solvent vapor annealing chamber was designed and constructed. The all-metal chamber is designed to be inert to solvent exposure. Computer-controlled, pneumatically actuated valves allow for precision timing in the introduction and withdrawal of solvent vapor from the film. The mass flow controller-regulated inlet, chamber pressure gauges, in situ spectral reflectance-based thickness monitoring, and low flow micrometer relief valve give real-time monitoring and control during the annealing and evaporation phases with unprecedented precision and accuracy. The reliable and repeatable alignment of polylactide cylinders formed from polystyrene-b-polylactide, where cylinders stand perpendicular to the substrate and span the thickness of the film, provides one illustrative example.
first_indexed 2024-12-10T13:59:51Z
format Article
id doaj.art-b8edfb2ddd174a09b848f94dad0d2883
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-12-10T13:59:51Z
publishDate 2018-05-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-b8edfb2ddd174a09b848f94dad0d28832022-12-22T01:45:51ZengMDPI AGMicromachines2072-666X2018-05-019627110.3390/mi9060271mi9060271High-Precision Solvent Vapor Annealing for Block Copolymer Thin FilmsGunnar Nelson0Chloe S. Drapes1Meagan A. Grant2Ryan Gnabasik3Jeffrey Wong4Andrew Baruth5Department of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADepartment of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADepartment of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADepartment of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADepartment of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADepartment of Physics, College of Arts and Sciences, Creighton University, 2500 California Plaza, Omaha, NE 68178, USADespite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer to direct the self-assembly process at the nanoscale. Recent developments in both theory and experiments have directly identified critical parameters that govern this process, but controlling them in any systematic way has proven non-trivial. These identified parameters include vapor pressure, solvent concentration in the film, and the solvent evaporation rate. To explore their role, a purpose-built solvent vapor annealing chamber was designed and constructed. The all-metal chamber is designed to be inert to solvent exposure. Computer-controlled, pneumatically actuated valves allow for precision timing in the introduction and withdrawal of solvent vapor from the film. The mass flow controller-regulated inlet, chamber pressure gauges, in situ spectral reflectance-based thickness monitoring, and low flow micrometer relief valve give real-time monitoring and control during the annealing and evaporation phases with unprecedented precision and accuracy. The reliable and repeatable alignment of polylactide cylinders formed from polystyrene-b-polylactide, where cylinders stand perpendicular to the substrate and span the thickness of the film, provides one illustrative example.http://www.mdpi.com/2072-666X/9/6/271block polymersself-assemblythin filmssolvent vapor annealingnanolithography
spellingShingle Gunnar Nelson
Chloe S. Drapes
Meagan A. Grant
Ryan Gnabasik
Jeffrey Wong
Andrew Baruth
High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
Micromachines
block polymers
self-assembly
thin films
solvent vapor annealing
nanolithography
title High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
title_full High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
title_fullStr High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
title_full_unstemmed High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
title_short High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
title_sort high precision solvent vapor annealing for block copolymer thin films
topic block polymers
self-assembly
thin films
solvent vapor annealing
nanolithography
url http://www.mdpi.com/2072-666X/9/6/271
work_keys_str_mv AT gunnarnelson highprecisionsolventvaporannealingforblockcopolymerthinfilms
AT chloesdrapes highprecisionsolventvaporannealingforblockcopolymerthinfilms
AT meaganagrant highprecisionsolventvaporannealingforblockcopolymerthinfilms
AT ryangnabasik highprecisionsolventvaporannealingforblockcopolymerthinfilms
AT jeffreywong highprecisionsolventvaporannealingforblockcopolymerthinfilms
AT andrewbaruth highprecisionsolventvaporannealingforblockcopolymerthinfilms