Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors
We report the preparation of (Ba, Sr)RuO3 ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Ba0.7Sr0.3TiO3 buffered SrTiO3 substrates. We found that a simultaneous addition of CuO and SiO2 is effective in obtaining the relatively dense ceram...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5063861 |
| _version_ | 1818061375372525568 |
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| author | Yuji Noguchi Masaru Tada Yuuki Kitanaka Masaru Miyayama |
| author_facet | Yuji Noguchi Masaru Tada Yuuki Kitanaka Masaru Miyayama |
| author_sort | Yuji Noguchi |
| collection | DOAJ |
| description | We report the preparation of (Ba, Sr)RuO3 ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Ba0.7Sr0.3TiO3 buffered SrTiO3 substrates. We found that a simultaneous addition of CuO and SiO2 is effective in obtaining the relatively dense ceramics. The microstructural and chemical investigations show that the synergetic effect of a liquid-phase (Ba-Sr-O) assisted grain growth accelerated by Cu-derived Ru charge inhomogeneity along with a rearrangement of grains promoted by a liquid-phase silicate is the mechanism of the (Ba, Sr)RuO3 densification. We demonstrate that all epitaxial BaTiO3 thin-film capacitors with (Ba1−xSrx)RuO3 electrodes can be obtained up to x of 0.6. |
| first_indexed | 2024-12-10T13:47:19Z |
| format | Article |
| id | doaj.art-b9b2f8cf09ab49079a6899591f088cfa |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-10T13:47:19Z |
| publishDate | 2018-11-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-b9b2f8cf09ab49079a6899591f088cfa2022-12-22T01:46:20ZengAIP Publishing LLCAIP Advances2158-32262018-11-01811115135115135-1810.1063/1.5063861112811ADVFabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitorsYuji Noguchi0Masaru Tada1Yuuki Kitanaka2Masaru Miyayama3Department of Applied Chemistry, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JapanTechnical Department, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-Ku, Tokyo 152-8552, JapanDepartment of Applied Chemistry, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JapanDepartment of Applied Chemistry, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JapanWe report the preparation of (Ba, Sr)RuO3 ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Ba0.7Sr0.3TiO3 buffered SrTiO3 substrates. We found that a simultaneous addition of CuO and SiO2 is effective in obtaining the relatively dense ceramics. The microstructural and chemical investigations show that the synergetic effect of a liquid-phase (Ba-Sr-O) assisted grain growth accelerated by Cu-derived Ru charge inhomogeneity along with a rearrangement of grains promoted by a liquid-phase silicate is the mechanism of the (Ba, Sr)RuO3 densification. We demonstrate that all epitaxial BaTiO3 thin-film capacitors with (Ba1−xSrx)RuO3 electrodes can be obtained up to x of 0.6.http://dx.doi.org/10.1063/1.5063861 |
| spellingShingle | Yuji Noguchi Masaru Tada Yuuki Kitanaka Masaru Miyayama Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors AIP Advances |
| title | Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors |
| title_full | Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors |
| title_fullStr | Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors |
| title_full_unstemmed | Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors |
| title_short | Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors |
| title_sort | fabrication and characterization of ba sr ruo3 ceramic targets and thin films for ferroelectric batio3 thin film capacitors |
| url | http://dx.doi.org/10.1063/1.5063861 |
| work_keys_str_mv | AT yujinoguchi fabricationandcharacterizationofbasrruo3ceramictargetsandthinfilmsforferroelectricbatio3thinfilmcapacitors AT masarutada fabricationandcharacterizationofbasrruo3ceramictargetsandthinfilmsforferroelectricbatio3thinfilmcapacitors AT yuukikitanaka fabricationandcharacterizationofbasrruo3ceramictargetsandthinfilmsforferroelectricbatio3thinfilmcapacitors AT masarumiyayama fabricationandcharacterizationofbasrruo3ceramictargetsandthinfilmsforferroelectricbatio3thinfilmcapacitors |