| 總結: | Subwavelength HfO<sub>2</sub> gratings are realized on a freestanding 200-nm-thick HfO<sub>2</sub> membrane with air as the low refractive index materials on top and bottom. Strong coupling between the incident light and HfO<sub>2</sub> grating is characterized by angular-resolved reflectivity measurement, and guided-mode resonances are experimentally demonstrated with the sensitivities to the parameters and shapes of grating and the polarization of incident beam. The experimental results are consistent with numerical simulation. This work opens the way to fabricate guided-mode resonant HfO<sub>2</sub> photonic devices in the visible wavelength range.
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