A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-finenes...

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Bibliographic Details
Main Authors: Suwei Wang, Jun Wang, Wenhao Li, Yangyang Liu, Jiashun Li, Pinggang Jia
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Micromachines
Subjects:
high temperature
pressure sensor
fiber-optic Fabry–Perot
high fineness
Online Access:https://www.mdpi.com/2072-666X/13/5/763

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https://www.mdpi.com/2072-666X/13/5/763

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