Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors

In this research, the enhancement in electrochemical performance of pyrolyzed carbon microelectrodes by surface modification is investigated. For the proposed microfabrication process, pyrolyzed carbon microelectrodes with multi-walled carbon nanotubes (MWCNTs) on their surface are obtained by devel...

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Main Authors: Liang He, Tianjiao Hong, Yue Huang, Biao Xiong, Xufeng Hong, Muhammad Tahir, Waqas Ali Haider, Yulai Han
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/10/5/307
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author Liang He
Tianjiao Hong
Yue Huang
Biao Xiong
Xufeng Hong
Muhammad Tahir
Waqas Ali Haider
Yulai Han
author_facet Liang He
Tianjiao Hong
Yue Huang
Biao Xiong
Xufeng Hong
Muhammad Tahir
Waqas Ali Haider
Yulai Han
author_sort Liang He
collection DOAJ
description In this research, the enhancement in electrochemical performance of pyrolyzed carbon microelectrodes by surface modification is investigated. For the proposed microfabrication process, pyrolyzed carbon microelectrodes with multi-walled carbon nanotubes (MWCNTs) on their surface are obtained by developing GM-1060 photoresist in mixture of propylene glycol methyl ether acetate (PGMEA) and CNTs, and following pyrolysis of a micropatterned photoresist. Polyvinyl alcohol (PVA)/H<sub>2</sub>SO<sub>4</sub> electrolyte (1 M) was applied to assemble this carbon/CNT microelectrode-based all-solid-state microsupercapacitor (carbon/CNT-MSC). The carbon/CNT-MSC shows a higher electrochemical performance compared with that of pyrolyzed carbon microelectrode-based MSC (carbon-MSC). The specific areal and volumetric capacitances of carbon/CNT-MSC (4.80 mF/cm<sup>2</sup> and 32.0 F/cm<sup>3</sup>) are higher than those of carbon-MSC (3.52 mF/cm<sup>2</sup> and 23.4 F/cm<sup>3</sup>) at the scan rate of 10 mV/s. In addition, higher energy density and power density of carbon/CNT-MSC (2.85 mWh/cm<sup>3</sup> and 1.98 W/cm<sup>3</sup>) than those of carbon-MSC (2.08 mWh/cm<sup>3</sup> and 1.41 W/cm<sup>3</sup>) were also achieved. This facile surface modification and optimization are potentially promising, being highly compatible with modern microfabrication technologies and allowing integration of highly electrically conductive CNTs into pyrolyzed carbon to assemble MSCs with improved electrochemical performance. Moreover, this method can be potentially applied to other high-performance micro/nanostructures and microdevices/systems.
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spelling doaj.art-bac2905f87a44116b11241d616abc8772022-12-21T19:48:06ZengMDPI AGMicromachines2072-666X2019-05-0110530710.3390/mi10050307mi10050307Surface Engineering of Carbon-Based Microelectrodes for High-Performance MicrosupercapacitorsLiang He0Tianjiao Hong1Yue Huang2Biao Xiong3Xufeng Hong4Muhammad Tahir5Waqas Ali Haider6Yulai Han7State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaSchool of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, ChinaIn this research, the enhancement in electrochemical performance of pyrolyzed carbon microelectrodes by surface modification is investigated. For the proposed microfabrication process, pyrolyzed carbon microelectrodes with multi-walled carbon nanotubes (MWCNTs) on their surface are obtained by developing GM-1060 photoresist in mixture of propylene glycol methyl ether acetate (PGMEA) and CNTs, and following pyrolysis of a micropatterned photoresist. Polyvinyl alcohol (PVA)/H<sub>2</sub>SO<sub>4</sub> electrolyte (1 M) was applied to assemble this carbon/CNT microelectrode-based all-solid-state microsupercapacitor (carbon/CNT-MSC). The carbon/CNT-MSC shows a higher electrochemical performance compared with that of pyrolyzed carbon microelectrode-based MSC (carbon-MSC). The specific areal and volumetric capacitances of carbon/CNT-MSC (4.80 mF/cm<sup>2</sup> and 32.0 F/cm<sup>3</sup>) are higher than those of carbon-MSC (3.52 mF/cm<sup>2</sup> and 23.4 F/cm<sup>3</sup>) at the scan rate of 10 mV/s. In addition, higher energy density and power density of carbon/CNT-MSC (2.85 mWh/cm<sup>3</sup> and 1.98 W/cm<sup>3</sup>) than those of carbon-MSC (2.08 mWh/cm<sup>3</sup> and 1.41 W/cm<sup>3</sup>) were also achieved. This facile surface modification and optimization are potentially promising, being highly compatible with modern microfabrication technologies and allowing integration of highly electrically conductive CNTs into pyrolyzed carbon to assemble MSCs with improved electrochemical performance. Moreover, this method can be potentially applied to other high-performance micro/nanostructures and microdevices/systems.https://www.mdpi.com/2072-666X/10/5/307microelectrodesupercapacitorcarbon
spellingShingle Liang He
Tianjiao Hong
Yue Huang
Biao Xiong
Xufeng Hong
Muhammad Tahir
Waqas Ali Haider
Yulai Han
Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
Micromachines
microelectrode
supercapacitor
carbon
title Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
title_full Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
title_fullStr Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
title_full_unstemmed Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
title_short Surface Engineering of Carbon-Based Microelectrodes for High-Performance Microsupercapacitors
title_sort surface engineering of carbon based microelectrodes for high performance microsupercapacitors
topic microelectrode
supercapacitor
carbon
url https://www.mdpi.com/2072-666X/10/5/307
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AT biaoxiong surfaceengineeringofcarbonbasedmicroelectrodesforhighperformancemicrosupercapacitors
AT xufenghong surfaceengineeringofcarbonbasedmicroelectrodesforhighperformancemicrosupercapacitors
AT muhammadtahir surfaceengineeringofcarbonbasedmicroelectrodesforhighperformancemicrosupercapacitors
AT waqasalihaider surfaceengineeringofcarbonbasedmicroelectrodesforhighperformancemicrosupercapacitors
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