Research on Dust Effect for MEMS Thermal Wind Sensors
This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surfa...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/12/5533 |
| _version_ | 1797592732212920320 |
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| author | Zhenxiang Yi Yishan Wang Ming Qin Qingan Huang |
| author_facet | Zhenxiang Yi Yishan Wang Ming Qin Qingan Huang |
| author_sort | Zhenxiang Yi |
| collection | DOAJ |
| description | This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments. |
| first_indexed | 2024-03-11T01:57:19Z |
| format | Article |
| id | doaj.art-bb70c7763e3e49b489dd0bb124318e6d |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T01:57:19Z |
| publishDate | 2023-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-bb70c7763e3e49b489dd0bb124318e6d2023-11-18T12:32:27ZengMDPI AGSensors1424-82202023-06-012312553310.3390/s23125533Research on Dust Effect for MEMS Thermal Wind SensorsZhenxiang Yi0Yishan Wang1Ming Qin2Qingan Huang3Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaThis communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments.https://www.mdpi.com/1424-8220/23/12/5533thermal wind sensordust effecttemperature differenceaccumulated dust |
| spellingShingle | Zhenxiang Yi Yishan Wang Ming Qin Qingan Huang Research on Dust Effect for MEMS Thermal Wind Sensors Sensors thermal wind sensor dust effect temperature difference accumulated dust |
| title | Research on Dust Effect for MEMS Thermal Wind Sensors |
| title_full | Research on Dust Effect for MEMS Thermal Wind Sensors |
| title_fullStr | Research on Dust Effect for MEMS Thermal Wind Sensors |
| title_full_unstemmed | Research on Dust Effect for MEMS Thermal Wind Sensors |
| title_short | Research on Dust Effect for MEMS Thermal Wind Sensors |
| title_sort | research on dust effect for mems thermal wind sensors |
| topic | thermal wind sensor dust effect temperature difference accumulated dust |
| url | https://www.mdpi.com/1424-8220/23/12/5533 |
| work_keys_str_mv | AT zhenxiangyi researchondusteffectformemsthermalwindsensors AT yishanwang researchondusteffectformemsthermalwindsensors AT mingqin researchondusteffectformemsthermalwindsensors AT qinganhuang researchondusteffectformemsthermalwindsensors |