| Summary: | Thermomechanical action during high-performance diamond grinding of sintered cutting Al<sub>2</sub>O<sub>3</sub>/TiC and SiAlON ceramics leads to increased defectiveness of the surface layer of the deposited TiZrN and CrAlSiN/DLC coatings. It predetermines the discontinuous and porous coatings and reduces its effectiveness under abrasive exposure and fretting wear. The developed technological approach is based on “dry” etching with beams of accelerated argon atoms with an energy of 5 keV for high-performance removal of defects. It ensures the removal of the defective layer on ceramics and reduces the index of defectiveness (the product of defects’ density per unit surface area) by several orders of magnitude, compared with diamond grinding. There are no pronounced discontinuities and pores in the microstructure of coatings. Under mechanical loads, the coatings ensure a stable boundary anti-friction film between the ceramics and counter body that significantly increases the wear resistance of samples. The treatment reduces the volumetric wear under 20 min of abrasive action by 2 and 6 times for TiZrN and CrAlSiN/DLC coatings for Al<sub>2</sub>O<sub>3</sub>/TiC and by 5 and 23 times for SiAlON. The volumetric wear under fretting wear at 105 friction cycles is reduced by 2–3 times for both coatings for Al<sub>2</sub>O<sub>3</sub>/TiC and by 3–4 times for SiAlON.
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