Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method

Transparent conductive films (TCFs) are crucial components of solar cells. In this study, F, Cl, and Ga co-doped ZnO (FCGZO) TCFs were deposited onto a glass substrate using the sol-gel spin-coating method and rapid thermal annealing. The effects of F-doping content on the structural, morphological,...

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Main Authors: Liwei Che, Jianmin Song, Jinzheng Yang, Xiaoyang Chen, Junjie Li, Nan Zhang, Shaopeng Yang, Yanfeng Wang
Format: Article
Language:English
Published: Elsevier 2023-07-01
Series:Journal of Materiomics
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2352847823000321
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author Liwei Che
Jianmin Song
Jinzheng Yang
Xiaoyang Chen
Junjie Li
Nan Zhang
Shaopeng Yang
Yanfeng Wang
author_facet Liwei Che
Jianmin Song
Jinzheng Yang
Xiaoyang Chen
Junjie Li
Nan Zhang
Shaopeng Yang
Yanfeng Wang
author_sort Liwei Che
collection DOAJ
description Transparent conductive films (TCFs) are crucial components of solar cells. In this study, F, Cl, and Ga co-doped ZnO (FCGZO) TCFs were deposited onto a glass substrate using the sol-gel spin-coating method and rapid thermal annealing. The effects of F-doping content on the structural, morphological, electrical, and optical properties of FCGZO films were examined by XRD, TEM, FE-SEM, PL spectroscopy, XPS, Hall effects testing, and UV–vis–NIR spectroscopy. All prepared ZnO films exhibited a hexagonal wurtzite structure and preferentially grew along the c axis perpendicular to the substrate. Changes in the doping concentration of F changed the interplanar crystal spacing and O vacancies in the film. At a doping ratio of 2% (in mole), the F, Cl, and Ga co-doped ZnO film exhibited the best photoelectric performance, with a carrier concentration of 2.62 × 1020 cm−3, mobility of 14.56 cm2/(V·s), and resistivity of 1.64 × 10−3 Ω·cm. The average transmittance (AT) in the 380–1 600 nm region nearly 90% with air as the reference, and the optical band gap was 3.52 eV.
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spelling doaj.art-bc39e4ee6caf4540858bd052f267e04d2023-07-11T04:06:28ZengElsevierJournal of Materiomics2352-84782023-07-0194745753Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin methodLiwei Che0Jianmin Song1Jinzheng Yang2Xiaoyang Chen3Junjie Li4Nan Zhang5Shaopeng Yang6Yanfeng Wang7College of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China; Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, ChinaCollege of Sciences, Hebei Agriculture University, Baoding, 071001, China; Corresponding author.College of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China; Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, ChinaCollege of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China; Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, ChinaCollege of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China; Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, ChinaDepartment of Intelligence Reconnaissance, Special Police Academy of the Chinese People's Armed Police Force, Beijing, 102211, China; Corresponding author.Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, China; Corresponding author.College of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China; Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding, 071002, China; Corresponding author. College of Sciences, Hebei North University, Photovoltaic Conductive Film Engineering Research Center of Hebei Province, Zhangjiakou, 075000, China.Transparent conductive films (TCFs) are crucial components of solar cells. In this study, F, Cl, and Ga co-doped ZnO (FCGZO) TCFs were deposited onto a glass substrate using the sol-gel spin-coating method and rapid thermal annealing. The effects of F-doping content on the structural, morphological, electrical, and optical properties of FCGZO films were examined by XRD, TEM, FE-SEM, PL spectroscopy, XPS, Hall effects testing, and UV–vis–NIR spectroscopy. All prepared ZnO films exhibited a hexagonal wurtzite structure and preferentially grew along the c axis perpendicular to the substrate. Changes in the doping concentration of F changed the interplanar crystal spacing and O vacancies in the film. At a doping ratio of 2% (in mole), the F, Cl, and Ga co-doped ZnO film exhibited the best photoelectric performance, with a carrier concentration of 2.62 × 1020 cm−3, mobility of 14.56 cm2/(V·s), and resistivity of 1.64 × 10−3 Ω·cm. The average transmittance (AT) in the 380–1 600 nm region nearly 90% with air as the reference, and the optical band gap was 3.52 eV.http://www.sciencedirect.com/science/article/pii/S2352847823000321ZnO transparent Conductive filmsSol-gel spin coatingElectrical propertyOptical property
spellingShingle Liwei Che
Jianmin Song
Jinzheng Yang
Xiaoyang Chen
Junjie Li
Nan Zhang
Shaopeng Yang
Yanfeng Wang
Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
Journal of Materiomics
ZnO transparent Conductive films
Sol-gel spin coating
Electrical property
Optical property
title Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
title_full Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
title_fullStr Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
title_full_unstemmed Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
title_short Fluorine, chlorine, and gallium co-doped zinc oxide transparent conductive films fabricated using the sol-gel spin method
title_sort fluorine chlorine and gallium co doped zinc oxide transparent conductive films fabricated using the sol gel spin method
topic ZnO transparent Conductive films
Sol-gel spin coating
Electrical property
Optical property
url http://www.sciencedirect.com/science/article/pii/S2352847823000321
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