Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications

Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications

In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting...

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Bibliographic Details
Main Authors: Jasmina Casals-Terré, Lluís Pradell, Julio César Heredia, Flavio Giacomozzi, Jacopo Iannacci, Adrián Contreras, Miquel Ribó
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Sensors
Subjects:
RF-MEMS switch
beam suspension
coplanar-waveguide
Online Access:https://www.mdpi.com/1424-8220/22/22/8893

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