Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries
Along with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very acute. The solution to this problem can be found in development of 3D batteries. The present work deals with the development of a technology for a 3D solid-state...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-09-01
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| Series: | Batteries |
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| Online Access: | https://www.mdpi.com/2313-0105/7/4/65 |
| _version_ | 1797506613147336704 |
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| author | Sergei Kurbatov Alexander Mironenko Victor Naumov Alexander Skundin Alexander Rudy |
| author_facet | Sergei Kurbatov Alexander Mironenko Victor Naumov Alexander Skundin Alexander Rudy |
| author_sort | Sergei Kurbatov |
| collection | DOAJ |
| description | Along with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very acute. The solution to this problem can be found in development of 3D batteries. The present work deals with the development of a technology for a 3D solid-state lithium-ion battery (3D SSLIB) manufacturing by plasma-chemical etching and magnetron sputtering technique. The results on testing of experimental samples of 3D SSLIB are presented. It was found that submicron-scale steps appearing on the surface of a 3D structure formed on Si substrate by the Bosch process radically change the crystal structure of the upper functional layers. Such changes can lead to disruption of the layers’ continuity, especially that of the down conductors. It is shown that surface polishing by liquid etching of the SiO<sub>2</sub> layer and silicon reoxidation leads to surface smoothing, the replacement of the dendrite structure of functional layers by a block structure, and a significant improvement in the capacitive characteristics of the battery. |
| first_indexed | 2024-03-10T04:35:03Z |
| format | Article |
| id | doaj.art-bc91f68752874633b25a67f1a7db246b |
| institution | Directory Open Access Journal |
| issn | 2313-0105 |
| language | English |
| last_indexed | 2024-03-10T04:35:03Z |
| publishDate | 2021-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Batteries |
| spelling | doaj.art-bc91f68752874633b25a67f1a7db246b2023-11-23T03:50:30ZengMDPI AGBatteries2313-01052021-09-01746510.3390/batteries7040065Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion BatteriesSergei Kurbatov0Alexander Mironenko1Victor Naumov2Alexander Skundin3Alexander Rudy4Department of Physics, P.G. Demidov Yaroslavl State University, 150003 Yaroslavl, RussiaDepartment of Physics, P.G. Demidov Yaroslavl State University, 150003 Yaroslavl, RussiaDepartment of Physics, P.G. Demidov Yaroslavl State University, 150003 Yaroslavl, RussiaFrumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences, 119071 Moscow, RussiaDepartment of Physics, P.G. Demidov Yaroslavl State University, 150003 Yaroslavl, RussiaAlong with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very acute. The solution to this problem can be found in development of 3D batteries. The present work deals with the development of a technology for a 3D solid-state lithium-ion battery (3D SSLIB) manufacturing by plasma-chemical etching and magnetron sputtering technique. The results on testing of experimental samples of 3D SSLIB are presented. It was found that submicron-scale steps appearing on the surface of a 3D structure formed on Si substrate by the Bosch process radically change the crystal structure of the upper functional layers. Such changes can lead to disruption of the layers’ continuity, especially that of the down conductors. It is shown that surface polishing by liquid etching of the SiO<sub>2</sub> layer and silicon reoxidation leads to surface smoothing, the replacement of the dendrite structure of functional layers by a block structure, and a significant improvement in the capacitive characteristics of the battery.https://www.mdpi.com/2313-0105/7/4/653D solid-state batteryplasma-chemical etchingmagnetron sputteringSi-O-Al nanocompositelithium cobaltiteLiPON |
| spellingShingle | Sergei Kurbatov Alexander Mironenko Victor Naumov Alexander Skundin Alexander Rudy Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries Batteries 3D solid-state battery plasma-chemical etching magnetron sputtering Si-O-Al nanocomposite lithium cobaltite LiPON |
| title | Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries |
| title_full | Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries |
| title_fullStr | Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries |
| title_full_unstemmed | Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries |
| title_short | Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries |
| title_sort | effect of the etching profile of a si substrate on the capacitive characteristics of three dimensional solid state lithium ion batteries |
| topic | 3D solid-state battery plasma-chemical etching magnetron sputtering Si-O-Al nanocomposite lithium cobaltite LiPON |
| url | https://www.mdpi.com/2313-0105/7/4/65 |
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