Research into Two Photonic-Integrated Waveguides Based on SiGe Material

SiGe (Silicon Germanium) is a common semiconductor material with many excellent properties, and many photonic-integrated devices are designed and fabricated with SiGe material. In this paper, two photonic-integrated SiGe waveguides are researched, namely the SiGe-SOI (Silicon Germanium-Silicon-On-In...

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Main Authors: Song Feng, Bin Xue
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/13/8/1877
_version_ 1797570500852973568
author Song Feng
Bin Xue
author_facet Song Feng
Bin Xue
author_sort Song Feng
collection DOAJ
description SiGe (Silicon Germanium) is a common semiconductor material with many excellent properties, and many photonic-integrated devices are designed and fabricated with SiGe material. In this paper, two photonic-integrated SiGe waveguides are researched, namely the SiGe-SOI (Silicon Germanium-Silicon-On-Insulator) waveguide and the SiGe-OI (Silicon Germanium-On-Insulator) waveguide. In order to verify which structure has the better waveguide performance, two waveguide structures are built, and the effective refractive indexes and the loss characteristics of the two waveguides are analyzed and compared. By simulation, the SiGe-OI optical waveguide has better losses characteristics at a wavelength of 1.55 μm. Finally, SiGe-OI and SiGe-SOI waveguides are fabricated and tested to verify the correctness of theoretical analysis, and the experimental results show that the transmission losses of the SiGe-OI waveguide are respectively decreased by 36.6% and 28.3% at 400 nm and 600 nm waveguide width in comparison with the SiGe-SOI waveguide. The results also show that the SiGe-OI waveguide has better loss characteristics than those of the SiGe-SOI waveguide at the low Ge content.
first_indexed 2024-03-10T20:25:27Z
format Article
id doaj.art-bcb13df741b94ec6a1860ce9360b6ae4
institution Directory Open Access Journal
issn 1996-1944
language English
last_indexed 2024-03-10T20:25:27Z
publishDate 2020-04-01
publisher MDPI AG
record_format Article
series Materials
spelling doaj.art-bcb13df741b94ec6a1860ce9360b6ae42023-11-19T21:50:08ZengMDPI AGMaterials1996-19442020-04-01138187710.3390/ma13081877Research into Two Photonic-Integrated Waveguides Based on SiGe MaterialSong Feng0Bin Xue1School of Science, Xi’an Polytechnic University, Xi’an 710048, ChinaSchool of Science, Xi’an Polytechnic University, Xi’an 710048, ChinaSiGe (Silicon Germanium) is a common semiconductor material with many excellent properties, and many photonic-integrated devices are designed and fabricated with SiGe material. In this paper, two photonic-integrated SiGe waveguides are researched, namely the SiGe-SOI (Silicon Germanium-Silicon-On-Insulator) waveguide and the SiGe-OI (Silicon Germanium-On-Insulator) waveguide. In order to verify which structure has the better waveguide performance, two waveguide structures are built, and the effective refractive indexes and the loss characteristics of the two waveguides are analyzed and compared. By simulation, the SiGe-OI optical waveguide has better losses characteristics at a wavelength of 1.55 μm. Finally, SiGe-OI and SiGe-SOI waveguides are fabricated and tested to verify the correctness of theoretical analysis, and the experimental results show that the transmission losses of the SiGe-OI waveguide are respectively decreased by 36.6% and 28.3% at 400 nm and 600 nm waveguide width in comparison with the SiGe-SOI waveguide. The results also show that the SiGe-OI waveguide has better loss characteristics than those of the SiGe-SOI waveguide at the low Ge content.https://www.mdpi.com/1996-1944/13/8/1877photonic-integratedSiGe materialwaveguidelosses
spellingShingle Song Feng
Bin Xue
Research into Two Photonic-Integrated Waveguides Based on SiGe Material
Materials
photonic-integrated
SiGe material
waveguide
losses
title Research into Two Photonic-Integrated Waveguides Based on SiGe Material
title_full Research into Two Photonic-Integrated Waveguides Based on SiGe Material
title_fullStr Research into Two Photonic-Integrated Waveguides Based on SiGe Material
title_full_unstemmed Research into Two Photonic-Integrated Waveguides Based on SiGe Material
title_short Research into Two Photonic-Integrated Waveguides Based on SiGe Material
title_sort research into two photonic integrated waveguides based on sige material
topic photonic-integrated
SiGe material
waveguide
losses
url https://www.mdpi.com/1996-1944/13/8/1877
work_keys_str_mv AT songfeng researchintotwophotonicintegratedwaveguidesbasedonsigematerial
AT binxue researchintotwophotonicintegratedwaveguidesbasedonsigematerial