Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form
A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
|
| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/9/12/340 |
| _version_ | 1797505913603489792 |
|---|---|
| author | Nikolay Samotaev Pavel Dzhumaev Konstantin Oblov Alexander Pisliakov Ivan Obraztsov Csaba Ducso Ferenc Biro |
| author_facet | Nikolay Samotaev Pavel Dzhumaev Konstantin Oblov Alexander Pisliakov Ivan Obraztsov Csaba Ducso Ferenc Biro |
| author_sort | Nikolay Samotaev |
| collection | DOAJ |
| description | A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 °C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW. |
| first_indexed | 2024-03-10T04:25:07Z |
| format | Article |
| id | doaj.art-bcf34b6442194f5dbad69a497272ac57 |
| institution | Directory Open Access Journal |
| issn | 2227-9040 |
| language | English |
| last_indexed | 2024-03-10T04:25:07Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Chemosensors |
| spelling | doaj.art-bcf34b6442194f5dbad69a497272ac572023-11-23T07:41:20ZengMDPI AGChemosensors2227-90402021-12-0191234010.3390/chemosensors9120340Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device FormNikolay Samotaev0Pavel Dzhumaev1Konstantin Oblov2Alexander Pisliakov3Ivan Obraztsov4Csaba Ducso5Ferenc Biro6MEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, Kashirskoe Highway 31, 115409 Moscow, RussiaMEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, Kashirskoe Highway 31, 115409 Moscow, RussiaMEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, Kashirskoe Highway 31, 115409 Moscow, RussiaMEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, Kashirskoe Highway 31, 115409 Moscow, RussiaMEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, Kashirskoe Highway 31, 115409 Moscow, RussiaCentre for Energy Research, Konkoly-Thege Miklós út 29-33, H-1121 Budapest, HungaryCentre for Energy Research, Konkoly-Thege Miklós út 29-33, H-1121 Budapest, HungaryA reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 °C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW.https://www.mdpi.com/2227-9040/9/12/340surface mounted devicesilicon MEMSceramic MEMSgas sensorflip-chip |
| spellingShingle | Nikolay Samotaev Pavel Dzhumaev Konstantin Oblov Alexander Pisliakov Ivan Obraztsov Csaba Ducso Ferenc Biro Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form Chemosensors surface mounted device silicon MEMS ceramic MEMS gas sensor flip-chip |
| title | Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form |
| title_full | Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form |
| title_fullStr | Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form |
| title_full_unstemmed | Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form |
| title_short | Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form |
| title_sort | silicon mems thermocatalytic gas sensor in miniature surface mounted device form |
| topic | surface mounted device silicon MEMS ceramic MEMS gas sensor flip-chip |
| url | https://www.mdpi.com/2227-9040/9/12/340 |
| work_keys_str_mv | AT nikolaysamotaev siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT paveldzhumaev siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT konstantinoblov siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT alexanderpisliakov siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT ivanobraztsov siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT csabaducso siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform AT ferencbiro siliconmemsthermocatalyticgassensorinminiaturesurfacemounteddeviceform |