Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference...

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Bibliographic Details
Main Authors: Nikolay Samotaev, Pavel Dzhumaev, Konstantin Oblov, Alexander Pisliakov, Ivan Obraztsov, Csaba Ducso, Ferenc Biro
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Chemosensors
Subjects:
surface mounted device
silicon MEMS
ceramic MEMS
gas sensor
flip-chip
Online Access:https://www.mdpi.com/2227-9040/9/12/340

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