Structural Properties of Post Annealed ITO Thin Films at Different Temperatures

Structural Properties of Post Annealed ITO Thin Films at Different Temperatures

Indium tin oxide (ITO) thin films were deposited on glass substrates by RF sputtering using an ITO ceramic target (In2O3-SnO2, 90-10 wt. %). After deposition, samples were annealed at different temperatures in vacuum furnace. The post vacuum annealing effects on the structural, optical and electrica...

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Bibliographic Details
Main Authors:	Negin Manavizadeh, Alireza Khodayari, Ebrahim Asl Soleimani, Sheida Bagherzadeh, Mohammad Hadi Maleki
Format:	Article
Language:	English
Published:	Iranian Institute of Research and Development in Chemical Industries (IRDCI)-ACECR 2009-06-01
Series:	Iranian Journal of Chemistry & Chemical Engineering
Subjects:	rf sputtering indium tin oxide annealing in vacuum transparent conductive films
Online Access:	http://www.ijcce.ac.ir/article_13367_57e82bba5ea40f0a1abcca4c2b74c47f.pdf

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