CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics. By adopting the existing layer in the complementary metal–oxide–semiconductor (CMOS) fabrication platform,...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2022-05-01
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| Series: | Frontiers in Mechanical Engineering |
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| Online Access: | https://www.frontiersin.org/articles/10.3389/fmech.2022.882344/full |