Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process

Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process

The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a three-axis sensing type. The structure of the mag...

Full description

Bibliographic Details
Main Authors: Wei-Ren Chen, Yao-Chuan Tsai, Po-Jen Shih, Cheng-Chih Hsu, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Sensors
Subjects:
magnetic microsensor
magnetic field effect transistor
CMOS
MEMS
Online Access:https://www.mdpi.com/1424-8220/20/17/4731

Similar Items

Similar Items