Utilizing a Diffractive Focus Beam Shaper to Enhance Pattern Uniformity and Process Throughput during Direct Laser Interference Patterning
Uniform periodic microstructure formation over large areas is generally challenging in Direct Laser Interference Patterning (DLIP) due to the Gaussian laser beam intensity distribution inherent to most commercial laser sources. In this work, a diffractive fundamental beam-mode shaper (FBS) element i...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-01-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/15/2/591 |